Invention Grant
- Patent Title: Thinner compositions
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Application No.: US14992061Application Date: 2016-01-11
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Publication No.: US09885955B2Publication Date: 2018-02-06
- Inventor: Ahn-Ho Lee , Seung-Hyun Ahn , Jin-Seok Yang , Sang-Tae Kim , Shi-Jin Sung , Kyong-Ho Lee
- Applicant: Samsung Electronics Co., Ltd. , DONGWOO FINE-CHEM
- Applicant Address: KR Suwon-si KR Pyeongtaek-si
- Assignee: Samsung Electronics Co., Ltd.,Dongwoo Fine-Chem
- Current Assignee: Samsung Electronics Co., Ltd.,Dongwoo Fine-Chem
- Current Assignee Address: KR Suwon-si KR Pyeongtaek-si
- Agency: Myers Bigel, P.A.
- Priority: KR10-2015-0004210 20150112
- Main IPC: G03F7/16
- IPC: G03F7/16 ; H01L21/31 ; H01L21/76 ; H01L21/02 ; H01L21/311 ; H01L21/768 ; H01L21/027

Abstract:
A thinner composition including an acetate-based compound in an amount in a range of about 30 weight percent to about 70 weight percent, a lactate-based compound in an amount in a range of about 1 weight percent to about 20 weight percent, a propionate-based compound in an amount in a range of about 30 weight percent to about 60 weight percent, and an ether-based additive in an amount in a range of about 10 ppm to about 500 ppm, based on a total amount of the composition.
Public/Granted literature
- US20160202610A1 THINNER COMPOSITIONS AND METHODS OF MANUFACTURING SEMICONDUCTOR DEVICES USING THE SAME Public/Granted day:2016-07-14
Information query
IPC分类: