Invention Grant
- Patent Title: Method for producing a composite structure
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Application No.: US14900257Application Date: 2014-06-17
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Publication No.: US09887124B2Publication Date: 2018-02-06
- Inventor: Nadia Ben Mohamed , Eric Maze
- Applicant: Soitec
- Applicant Address: FR Bernin
- Assignee: Soitec
- Current Assignee: Soitec
- Current Assignee Address: FR Bernin
- Agency: TraskBritt
- Priority: FR1301528 20130628
- International Application: PCT/FR2014/051487 WO 20140617
- International Announcement: WO2014/207346 WO 20141231
- Main IPC: H01L21/30
- IPC: H01L21/30 ; H01L21/46 ; H01L21/42 ; H01L21/00 ; H01L21/762 ; H01L21/02 ; H01L21/306

Abstract:
A process for the manufacture of a composite structure includes the following stages: a) providing a donor substrate comprising a first surface and a support substrate; b) forming a zone of weakening in the donor substrate, the zone of weakening delimiting, with the first surface of the donor substrate, a working layer; c) assembling the support substrate and the donor substrate; d) fracturing the donor substrate along the zone of weakening; and e) thinning the working layer so as to form a thinned working layer. Stage b) is carried out so that the working layer exhibits a thickness profile appropriate for compensating for the nonuniformity in consumption of the working layer during stage e).
Public/Granted literature
- US20160372361A1 METHOD FOR PRODUCING A COMPOSITE STRUCTURE Public/Granted day:2016-12-22
Information query
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