公开(公告)号：US09887124B2

公开(公告)日：2018-02-06

申请号：US14900257

申请日：2014-06-17

Applicant: Soitec

Inventor： Nadia Ben Mohamed ,  Eric Maze

IPC: H01L21/30 ,  H01L21/46 ,  H01L21/42 ,  H01L21/00 ,  H01L21/762 ,  H01L21/02 ,  H01L21/306

CPC classification number: H01L21/76254 ,  H01L21/02236 ,  H01L21/30604

Abstract: A process for the manufacture of a composite structure includes the following stages: a) providing a donor substrate comprising a first surface and a support substrate; b) forming a zone of weakening in the donor substrate, the zone of weakening delimiting, with the first surface of the donor substrate, a working layer; c) assembling the support substrate and the donor substrate; d) fracturing the donor substrate along the zone of weakening; and e) thinning the working layer so as to form a thinned working layer. Stage b) is carried out so that the working layer exhibits a thickness profile appropriate for compensating for the nonuniformity in consumption of the working layer during stage e).

公开(公告)号：US20160372361A1

公开(公告)日：2016-12-22

申请号：US14900257

申请日：2014-06-17

Applicant: SOITEC

Inventor： Nadia Ben Mohamed ,  Eric Maze

IPC: H01L21/762 ,  H01L21/02

CPC classification number: H01L21/76254 ,  H01L21/02236 ,  H01L21/30604

Abstract: A process for the manufacture of a composite structure includes the following stages: a) providing a donor substrate comprising a first surface and a support substrate; b) forming a zone of weakening in the donor substrate, the zone of weakening delimiting, with the first surface of the donor substrate, a working layer; c) assembling the support substrate and the donor substrate; d) fracturing the donor substrate along the zone of weakening; and e) thinning the working layer so as to form a thinned working layer. Stage b) is carried out so that the working layer exhibits a thickness profile appropriate for compensating for the nonuniformity in consumption of the working layer during stage e).

Abstract translation: 一种用于制造复合结构的方法包括以下阶段：a）提供包括第一表面和支撑衬底的施主衬底; b）在施主衬底中形成弱化区域，所述施主衬底的第一表面为工作层; c）组装支撑衬底和供体衬底; d）沿着弱化区域压裂施主衬底; 以及e）使工作层变薄以便形成变薄的工作层。 阶段b）进行，使得工作层呈现适于补偿阶段e）期间工作层的消耗不均匀性的厚度分布。