Invention Grant
- Patent Title: Semiconductor device having low impedance and method of manufacturing the same
-
Application No.: US14853459Application Date: 2015-09-14
-
Publication No.: US09887286B2Publication Date: 2018-02-06
- Inventor: Dae Hwan Chun , Jong Seok Lee , Junghee Park , Kyoung-Kook Hong , Youngkyun Jung
- Applicant: HYUNDAI MOTOR COMPANY
- Applicant Address: KR Seoul
- Assignee: HYUNDAI MOTOR COMPANY
- Current Assignee: HYUNDAI MOTOR COMPANY
- Current Assignee Address: KR Seoul
- Agency: McDermott Will & Emery LLP
- Priority: KR10-2014-0179659 20141212
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66 ; H01L29/10 ; H01L29/16

Abstract:
The present inventive concept relates to a semiconductor device, and more particularly to a semiconductor device that can increase the amount of current by reducing impedance, and a method of manufacturing the semiconductor device.A semiconductor device comprises an n− type epitaxial layer disposed on a first surface of an n+ type silicon carbide substrate; an n+ region disposed on the n− type epitaxial layer; first and second trenches disposed in the n− type epitaxial layer and the n+ region; first and second gate insulating layers disposed inside the first and second trenches, respectively; first and second gate electrodes disposed on the first and second gate insulating layers, respectively; a p-type region disposed on two sides of one of the first and second trenches; an oxidation film disposed on the first and second gate electrodes; a source electrode disposed on the n+ region and the oxidation film; and a drain electrode disposed on a second surface of the n+ type silicon carbide substrate, wherein a first channel is disposed on two sides of the first trench and a second channel is disposed on two sides of the second trench.
Public/Granted literature
- US20160172483A1 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2016-06-16
Information query
IPC分类: