SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

    公开(公告)号:US20190334036A1

    公开(公告)日:2019-10-31

    申请号:US16172647

    申请日:2018-10-26

    Inventor: Dae Hwan Chun

    Abstract: A semiconductor device is provide. The device includes a first n− type of layer, a second n− type of layer, and an n+ type of region sequentially disposed on a first surface of a substrate. A trench is disposed on a side surface of the second n− type of layer, a p type of region is disposed between the second n− type of layer and the trench, and a gate electrode is disposed on a bottom surface of the trench. A source electrode is disposed on the n+ type of region and a drain electrode is disposed on a second surface of the substrate. The second n− type of layer includes a first concentration layer, a second concentration layer, a third concentration layer, and a fourth concentration layer sequentially disposed on the first n− type of layer.

    Semiconductor device comprising accumulation layer channel and inversion layer channel

    公开(公告)号:US10115794B2

    公开(公告)日:2018-10-30

    申请号:US15363892

    申请日:2016-11-29

    Abstract: A semiconductor device includes: an n− type layer disposed on a first surface of an n+ type silicon carbide substrate; a first trench formed in the n− type layer; a p type region disposed on both side surfaces of the first trench; an n+ type region disposed on both side surfaces of the first trench and disposed on the n− type layer and the p type region; a gate insulating layer disposed inside the first trench; a gate electrode disposed on the gate insulating layer; an oxide layer disposed on the gate electrode; a source electrode disposed on the oxide layer and the n+ region; and a drain electrode disposed on the second surface of the n+ type silicon carbide substrate, wherein a first channel as an accumulation layer channel and a second channel as an inversion layer channel are disposed in both side surfaces of the first trench, and the first channel and the second channel are disposed to be adjacent in a horizontal direction for the first surface of the n+ type silicon carbide substrate.

    Schottky barrier diode and method for manufacturing schottky barrier diode
    10.
    发明授权
    Schottky barrier diode and method for manufacturing schottky barrier diode 有权
    肖特基势垒二极管及制造肖特基势垒二极管的方法

    公开(公告)号:US09006746B2

    公开(公告)日:2015-04-14

    申请号:US14143649

    申请日:2013-12-30

    CPC classification number: H01L29/872 H01L29/0619 H01L29/1608 H01L29/6606

    Abstract: A Schottky barrier diode and a method of manufacturing the diode are provided. The diode includes an n− type epitaxial layer disposed on a first surface of an n+ type silicon carbide substrate and a plurality of p+ regions disposed within the n− type epitaxial layer. An n+ type epitaxial layer is disposed on the n− type epitaxial layer, a Schottky electrode is disposed on the n+ type epitaxial layer, and an ohmic electrode is disposed on a second surface of the n+ type silicon carbide substrate. The n+ type epitaxial layer includes a plurality of pillar parts disposed on the n− type epitaxial layer and a plurality of openings disposed between the pillar parts and that expose the p+ regions. Each of the pillar parts includes substantially straight parts that contact the n− type epitaxial layer and substantially curved parts that extend from the substantially straight parts.

    Abstract translation: 提供肖特基势垒二极管和制造二极管的方法。 二极管包括设置在n +型碳化硅衬底的第一表面上的n型外延层和设置在n型外延层内的多个p +区。 在n型外延层上设置n +型外延层,在n +型外延层上设置肖特基电极,在n +型碳化硅基板的第二面上设置欧姆电极。 n +型外延层包括设置在n型外延层上的多个柱部分和设置在柱部分之间并暴露p +区域的多个开口。 每个支柱部分包括接触n型外延层的基本上直的部分和从基本上直的部分延伸的基本上弯曲的部分。

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