- 专利标题: Method for structuring layer surfaces
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申请号: US14647911申请日: 2013-11-28
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公开(公告)号: US09890450B2公开(公告)日: 2018-02-13
- 发明人: Jurgen Ramm , Beno Widrig , Matthias Lukas Sobiech , Doris Fopp-Spori
- 申请人: Oerlikon Surface Solutions AG, Trubbach
- 申请人地址: CH Pfäffikon SZ
- 专利权人: OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- 当前专利权人: OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- 当前专利权人地址: CH Pfäffikon SZ
- 代理机构: Pearne & Gordon LLP
- 优先权: DE102012023260 20121129
- 国际申请: PCT/EP2013/003595 WO 20131128
- 国际公布: WO2014/082746 WO 20140605
- 主分类号: C23C14/32
- IPC分类号: C23C14/32 ; C23C14/14 ; C23C14/06 ; C22C27/04 ; H01J37/32
摘要:
A coating method based on gas phase deposition by arc evaporation, with the steps: selecting a first target as a material source for the coating; providing a coating chamber with an arc evaporation source including the selected target; loading the chamber with substrates to be coated; pumping down the chamber to a process pressure suitable for the arc evaporation; and igniting and operating the arc such that material is evaporated from the first target and is then deposited on the substrates to be coated, optionally after reaction with a reactive gas admitted into the coating chamber. The first target includes at least one matrix component and one doping component such that the doping component has a melting point at least 500° C. lower than the matrix component, and a melted drop of the doping component on a solid surface of the matrix component assumes a contact angle of a least 90°.
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