Invention Grant
- Patent Title: Extreme ultraviolet light generation apparatus
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Application No.: US15062896Application Date: 2016-03-07
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Publication No.: US09894744B2Publication Date: 2018-02-13
- Inventor: Fumio Iwamoto , Yutaka Shiraishi , Tsukasa Hori , Takuya Ishii
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Main IPC: H05G2/00
- IPC: H05G2/00 ; G03F7/20

Abstract:
An extreme ultraviolet light generation apparatus may include: a chamber in which extreme ultraviolet light is generated when a target is irradiated with a laser beam inside the chamber; a target supply part configured to supply the target into the chamber; and a target collector configured to collect the target which is supplied by the target supply part but is not irradiated with the laser beam in a collection container, by receiving the target on a receiving surface having a contact angle of greater than 90 degrees with the target.
Public/Granted literature
- US20160192470A1 EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS Public/Granted day:2016-06-30
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