Invention Grant
- Patent Title: Method of calibrating and using a measuring apparatus that performs measurements using a spectrum of light
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Application No.: US15402751Application Date: 2017-01-10
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Publication No.: US09897486B2Publication Date: 2018-02-20
- Inventor: Tae-Yong Jo , Young-Joo Lee , Chang-Hoon Choi , Jong-Jeong Kim
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si, Gyeonggi-Do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si, Gyeonggi-Do
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2016-0059789 20160516
- Main IPC: G01D18/00
- IPC: G01D18/00 ; G01J3/02
Abstract:
A method of calibrating a measuring apparatus includes determining apparatus parameters that have an influence on a measurement spectrum generated by the measuring apparatus, generating the measurement spectrum by exposing a measurement target on a sample to light generated by the measuring apparatus, calculating an error of the apparatus parameters by comparing the measurement spectrum to an ideal spectrum corresponding to the apparatus parameters, and calibrating the measuring apparatus based on the calculated error of the apparatus parameters.
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