- 专利标题: Differential infra red nanoscopy system and method
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申请号: US14758898申请日: 2014-01-06
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公开(公告)号: US09897536B2公开(公告)日: 2018-02-20
- 发明人: Christophe Silien , Ning Liu , Andre Peremans , David Symens , Syed A. M. Tofail
- 申请人: University of Limerick , Laserspec
- 申请人地址: IE Limerick
- 专利权人: University of Limerick
- 当前专利权人: University of Limerick
- 当前专利权人地址: IE Limerick
- 代理机构: K&L Gates LLP
- 优先权: EP13150265 20130104
- 国际申请: PCT/EP2014/050099 WO 20140106
- 国际公布: WO2014/106657 WO 20140710
- 主分类号: G01N21/00
- IPC分类号: G01N21/00 ; G01N21/25 ; G02B21/00 ; G02B27/58
摘要:
The invention provides a method and system to record the absorption of a sample, said method comprising the steps of providing first and second pulsed beam of light on said sample using one or more light beams, said first and second pulsed beam having different spatial definition; measuring the difference in intensity transmitted through and/or reflected by a sample; and generating an image by scanning the sample while making such measurements. The system and method of the invention can work down to resolution of several 100 of nm, affording thus a large improvement in comparison to synchrotron IR imaging that is the closest technique existing today. The advantage versus scanning probe approach is the absence of physical probe, thus suppressing confinement to surface information and removing uncertainty regarding the working behavior of the probe.
公开/授权文献
- US20150338337A1 DIFFERENTIAL INFRA RED NANOSCOPY SYSTEM AND METHOD 公开/授权日:2015-11-26
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