Invention Grant
- Patent Title: Bulk acoustic wave resonator
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Application No.: US13686005Application Date: 2012-11-27
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Publication No.: US09899593B2Publication Date: 2018-02-20
- Inventor: Jea Shik Shin , Duck Hwan Kim , Chul Soo Kim , Ho Soo Park , Sang Uk Son , In Sang Song , Moon Chul Lee , Cui Jing
- Applicant: SAMSUNG ELECTRONICS CO., LTD
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: NSIP Law
- Priority: KR10-2012-0005760 20120118
- Main IPC: H01L41/107
- IPC: H01L41/107 ; H03H9/17 ; H03H9/02
Abstract:
Provided is a bulk acoustic wave resonator (BAWR). The BAWR may include an air cavity disposed on a substrate, a bulk acoustic wave resonant unit including a piezoelectric layer, and a reflective layer to reflect a wave of a resonant frequency that is generated from the piezoelectric layer.
Public/Granted literature
- US20130181579A1 BULK ACOUSTIC WAVE RESONATOR Public/Granted day:2013-07-18
Information query
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