Pressure sensor comprising first pressure sensitive element and second pressure sensitive element
Abstract:
A pressure sensor according to an aspect of the present disclosure includes: a first pressure sensitive element including a first conductive layer including first projections having conductivity, first wiring layers, and a first dielectric layer provided between the first projections and the first wiring layers; and a second pressure sensitive element including a second conductive layer including second projections having conductivity, second wiring layers, and a second dielectric layer provided between the second projections and the second wiring layers. The first pressure sensitive element and the second pressure sensitive element are stacked on each other.
Information query
Patent Agency Ranking
0/0