Invention Grant
- Patent Title: Fin-type field-effect transistors with strained channels
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Application No.: US15457017Application Date: 2017-03-13
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Publication No.: US09905694B2Publication Date: 2018-02-27
- Inventor: Henry K. Utomo , Reinaldo A. Vega , Yun Y. Wang
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Thompson Hine LLP
- Agent Yuanmin Cai
- Main IPC: H01L29/78
- IPC: H01L29/78

Abstract:
Device structures for a fin-type field-effect transistor (FinFET) and methods for fabricating a device structure for a FinFET. A fin comprised of a semiconductor material having a first crystal structure is formed. A dielectric layer is formed that includes an opening aligned with the fin. A dummy gate structure is removed from the opening in the dielectric layer. After the dummy gate structure is removed, a section of the fin aligned with the opening is implanted with non-dopant ions to amorphize the first crystal structure of the semiconductor material of the fin. After the section of the fin is implanted, the section of the fin is annealed such that the semiconductor material in the section of the fin recrystallizes with a second crystal structure incorporating internal strain.
Public/Granted literature
- US20180026137A1 FIN-TYPE FIELD-EFFECT TRANSISTORS WITH STRAINED CHANNELS Public/Granted day:2018-01-25
Information query
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