- 专利标题： Nano-aperture fabrication using template guided thermal dewetting
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申请号： US14873293申请日： 2015-10-02
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公开(公告)号： US09909203B2公开(公告)日： 2018-03-06
- 发明人: Joel Kwang Wei Yang , Ying Min Wang , Mohamed Asbahi , Yong-Wei Zhang , Liangxing Lu , Bharathi Madurai Srinivasan
- 申请人： Agency for Science, Technology and Research
- 申请人地址： SG Singapore
- 专利权人： Agency for Science, Technology and Research
- 当前专利权人： Agency for Science, Technology and Research
- 当前专利权人地址： SG Singapore
- 代理机构： Schwegman Lundberg & Woessner, P.A.
- 主分类号： C23C10/60
- IPC分类号： C23C10/60 ; C23C14/16 ; C23C14/18 ; C23C14/30 ; C23C14/58
摘要：
A method for fabrication of metal film with nanoapertures is provided. The method includes the steps of providing a nanopatterned template including a plurality of nanostructures, depositing of the metal film onto the nanopatterned template, and thermally induced dewetting of the metal film to define the nanoapertures in the metal film by diffusion and reflow of the metal film.
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