- Patent Title: Nano-aperture fabrication using template guided thermal dewetting
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Application No.: US14873293Application Date: 2015-10-02
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Publication No.: US09909203B2Publication Date: 2018-03-06
- Inventor: Joel Kwang Wei Yang , Ying Min Wang , Mohamed Asbahi , Yong-Wei Zhang , Liangxing Lu , Bharathi Madurai Srinivasan
- Applicant: Agency for Science, Technology and Research
- Applicant Address: SG Singapore
- Assignee: Agency for Science, Technology and Research
- Current Assignee: Agency for Science, Technology and Research
- Current Assignee Address: SG Singapore
- Agency: Schwegman Lundberg & Woessner, P.A.
- Main IPC: C23C10/60
- IPC: C23C10/60 ; C23C14/16 ; C23C14/18 ; C23C14/30 ; C23C14/58
Abstract:
A method for fabrication of metal film with nanoapertures is provided. The method includes the steps of providing a nanopatterned template including a plurality of nanostructures, depositing of the metal film onto the nanopatterned template, and thermally induced dewetting of the metal film to define the nanoapertures in the metal film by diffusion and reflow of the metal film.
Public/Granted literature
- US20160097116A1 NANO-APERTURE FABRICATION USING TEMPLATE GUIDED THERMAL DEWETTING Public/Granted day:2016-04-07
Information query
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