Invention Grant
- Patent Title: Lithographic apparatus, method for positioning an object in a lithographic apparatus and device manufacturing method
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Application No.: US15303192Application Date: 2015-04-15
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Publication No.: US09910367B2Publication Date: 2018-03-06
- Inventor: Sander Christiaan Broers
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman, LLP
- Priority: EP14164988 20140416
- International Application: PCT/EP2015/058209 WO 20150415
- International Announcement: WO2015/158793 WO 20151022
- Main IPC: G03B27/58
- IPC: G03B27/58 ; G03F7/20

Abstract:
A lithographic apparatus including: a first object, a second object which is moveable relative to the first object in a moving direction, a set of cables and/or tubing arranged between the first object and the second object, a guiding drum to guide the set of cables and/or tubing, the guiding drum being rotatable about a rotation axis extending perpendicular to the moving direction, a drum positioning device to position the guiding drum such that it follows movement of the set of cables and/or tubing caused by movement of the second object relative to the first object and a guiding structure to guide movement of the guiding drum in the moving direction.
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