Invention Grant
- Patent Title: MEMS switch device and method of fabrication
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Application No.: US13955866Application Date: 2013-07-31
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Publication No.: US09911563B2Publication Date: 2018-03-06
- Inventor: John G Macnamara , Padraig L. Fitzgerald , Raymond C Goggin , Bernard P Stenson
- Applicant: ANALOG DEVICES GLOBAL
- Applicant Address: BM Hamilton
- Assignee: ANALOG DEVICES GLOBAL
- Current Assignee: ANALOG DEVICES GLOBAL
- Current Assignee Address: BM Hamilton
- Agency: Knobbe, Martens, Olson & Bear LLP
- Main IPC: H01H59/00
- IPC: H01H59/00 ; B81C1/00 ; B81B7/00 ; H01H1/00

Abstract:
A MEMS switch device including: a substrate layer; an insulating layer formed over the substrate layer; and a MEMS switch module having a plurality of contacts formed on the surface of the insulating layer, wherein the insulating layer includes a number of conductive pathways formed within the insulating layer, the conductive pathways being configured to interconnect selected contacts of the MEMS switch module.
Public/Granted literature
- US20150035387A1 MEMS SWITCH DEVICE AND METHOD OF FABRICATION Public/Granted day:2015-02-05
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