Invention Grant
- Patent Title: Semiconductor constructions and methods of forming intersecting lines of material
-
Application No.: US15182462Application Date: 2016-06-14
-
Publication No.: US09911643B2Publication Date: 2018-03-06
- Inventor: Hongqi Li , Gowrisankar Damarla , Robert J. Hanson , Jin Lu , Shyam Ramalingam
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Well St. John P.S.
- Main IPC: H01L21/4763
- IPC: H01L21/4763 ; H01L21/768 ; H01L23/522 ; H01L23/528 ; H01L23/48

Abstract:
Some embodiments include semiconductor constructions having first and second electrically conductive lines that intersect with one another at an intersection. The first line has primarily a first width, and has narrowed regions directly against the second line and on opposing sides of the second line from one another. Electrically conductive contacts are along the first line and directly electrically coupled to the first line, and one of the electrically conductive contacts is directly against the intersection. Some embodiments include methods of forming intersecting lines of material. First and second trenches are formed, and intersect with one another at an intersection. The first trench has primarily a first width, and has narrowed regions directly against the second trench and on opposing sides of the second trench from one another. Material is deposited within the first and second trenches to substantially entirely fill the first and second trenches.
Public/Granted literature
- US20160293482A1 Semiconductor Constructions and Methods of Forming Intersecting Lines of Material Public/Granted day:2016-10-06
Information query
IPC分类: