- 专利标题: Thin-film transistor and method of manufacturing the same field
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申请号: US14944711申请日: 2015-11-18
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公开(公告)号: US09911859B2公开(公告)日: 2018-03-06
- 发明人: Hajime Watakabe , Arichika Ishida , Takashi Okada , Masayoshi Fuchi , Akihiro Hanada
- 申请人: Japan Display Inc.
- 申请人地址: JP Minato-ku
- 专利权人: Japan Display Inc.
- 当前专利权人: Japan Display Inc.
- 当前专利权人地址: JP Minato-ku
- 代理机构: Oblon, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2014-237936 20141125
- 主分类号: H01L29/10
- IPC分类号: H01L29/10 ; H01L29/786 ; H01L29/66
摘要:
According to one embodiment, a thin-film transistor and a method of manufacturing the same achieve size reduction of the thin-film transistor while using an oxide semiconductor layer. The oxide semiconductor layer includes a channel region, a source region, and a drain region. A gate electrode is arranged at a position spaced from the channel region of the oxide semiconductor layer so as to face the channel region. A source electrode is electrically connected to the source region of the oxide semiconductor layer. A drain electrode is electrically connected to the drain region of the oxide semiconductor layer. An undercoat layer adjoins the source region and the drain region of the oxide semiconductor layer. A hydrogen blocking layer has a hydrogen concentration lower than that in the undercoat layer and separates the undercoat layer and the channel region of the oxide semiconductor layer.
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