Invention Grant
- Patent Title: GaSbGe phase change memory materials
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Application No.: US14936318Application Date: 2015-11-09
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Publication No.: US09917252B2Publication Date: 2018-03-13
- Inventor: Huai-Yu Cheng , Hsiang-Lan Lung
- Applicant: MACRONIX INTERNATIONAL CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Haynes Beffel & Wolfeld LLP
- Main IPC: H01L45/00
- IPC: H01L45/00 ; C22C12/00 ; C22C28/00 ; C22C30/00 ; H01B1/02 ; H01L27/24

Abstract:
A Ga—Sb—Ge family of phase change memory materials is described, including GaxSbyGez, wherein a Ga atomic concentration x is within a range from 20% to 45%, a Sb atomic concentration y is within a range from 25% to 40% and a Ge atomic concentration z is within a range from 25% to 55%, is described wherein the material has a crystallization transition temperature Tx greater than 360° C. Adding impurities including one or more element selected from silicon Si, carbon C, oxygen O and nitrogen N, can also increase the crystallization transition temperature Tx to temperatures greater than 400° C., and also reduce reset current.
Public/Granted literature
- US20160372661A1 GaSbGe PHASE CHANGE MEMORY MATERIALS Public/Granted day:2016-12-22
Information query
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