Invention Grant
- Patent Title: Vertical transistors and methods of forming same
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Application No.: US15198309Application Date: 2016-06-30
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Publication No.: US09929152B2Publication Date: 2018-03-27
- Inventor: Brent A. Anderson , Edward J. Nowak
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Hoffman Warnick LLC
- Agent Yuanmin Cai
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L21/8234

Abstract:
One aspect of the disclosure relates to an integrated circuit structure. The integrated circuit structure may include a fin having a first source/drain region and a second source/drain, the first source/drain region being over a substrate and below a central region of the fin, and the second source/drain region being within a dielectric layer and over the central region of the fin; a gate structure within the dielectric layer substantially surrounding the central region of the fin between the first source/drain region and the second source drain region, wherein the fin includes at least one tapered region from the central region of the fin to at least one of the first source/drain region or the second source/drain region.
Public/Granted literature
- US20180006024A1 VERTICAL TRANSISTORS AND METHODS OF FORMING SAME Public/Granted day:2018-01-04
Information query
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