Invention Grant
- Patent Title: Pressure sensing device with cavity and related methods
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Application No.: US14626153Application Date: 2015-02-19
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Publication No.: US09939338B2Publication Date: 2018-04-10
- Inventor: Alberto Pagani , Federico Giovanni Ziglioli , Bruno Murari
- Applicant: STMICROELECTRONICS S.r.l.
- Applicant Address: IT Agrate Brianza (MB)
- Assignee: STMicroelectronics S.R.L.
- Current Assignee: STMicroelectronics S.R.L.
- Current Assignee Address: IT Agrate Brianza (MB)
- Agency: Slater Matsil, LLP
- Main IPC: G01L1/20
- IPC: G01L1/20 ; G01L5/00 ; G01L1/18 ; F16B31/02
Abstract:
A pressure sensing device may include a body configured to distribute a load applied between first and second parts positioned one against the other, and a pressure sensor carried by the body. The pressure sensor may include a support body, and an IC die mounted with the support body and defining a cavity. The IC die may include pressure sensing circuitry responsive to bending associated with the cavity, and an IC interface coupled to the pressure sensing circuitry.
Public/Granted literature
- US20160245709A1 PRESSURE SENSING DEVICE WITH CAVITY AND RELATED METHODS Public/Granted day:2016-08-25
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