Invention Grant
- Patent Title: Photolithography method and system based on high step slope
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Application No.: US14435945Application Date: 2013-09-03
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Publication No.: US09939724B2Publication Date: 2018-04-10
- Inventor: Jiale Su
- Applicant: CSMC TECHNOLOGIES FAB1 CO., LTD.
- Applicant Address: CN
- Assignee: CSMC TECHNOLOGIES FABI CO., LTD.
- Current Assignee: CSMC TECHNOLOGIES FABI CO., LTD.
- Current Assignee Address: CN
- Agency: Widerman Malek, PL
- Agent Mark Malek; Daniel C. Pierron
- Priority: CN201210407378 20121023
- International Application: PCT/CN2013/082887 WO 20130903
- International Announcement: WO2014/063532 WO 20140501
- Main IPC: G03F1/38
- IPC: G03F1/38 ; G03F7/20

Abstract:
A photolithography method and system based on a high step slope are provided. The method includes: S1, manufacturing a sacrificial layer with a high step slope on a substrate; S2, adopting a spin-on PR coating process to cover the sacrificial layer with a photoresist layer to form a photolithographic layer; S3, forming a mask pattern and a compensation pattern on a mask; and S4, performing photolithography processes, by a photolithography machine, on the photolithographic layer. By forming a slope-top compensation pattern and a slope compensation pattern on a mask to perform photolithography on the substrate of a sacrificial layer, a relatively wide compensation pattern is set in a part of the top of the slope with a small thickness, thereby compensating the overexposure at the top of the slope, reducing the error in the photolithographic pattern, and improving the precision of photolithography of the high step slope.
Public/Granted literature
- US20150227048A1 PHOTOLITHOGRAPHY METHOD AND SYSTEM BASED ON HIGH STEP SLOPE Public/Granted day:2015-08-13
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