Invention Grant
- Patent Title: Fin-shaped field effect transistor and capacitor structures
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Application No.: US14069174Application Date: 2013-10-31
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Publication No.: US09941271B2Publication Date: 2018-04-10
- Inventor: Shom Surendran Ponoth , Changyok Park , Akira Ito
- Applicant: BROADCOM CORPORATION
- Applicant Address: SG Singapore
- Assignee: AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD.
- Current Assignee: AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: McDermott Will & Emery LLP
- Main IPC: H01L27/10
- IPC: H01L27/10 ; H01L21/70 ; H01L27/088 ; H01L27/06

Abstract:
A fin-shaped field-effect transistor device is provided. The fin-shaped field effect transistor device may include a semiconductor substrate having a top and a bottom surface. The fin-shaped field effect transistor device may also include a fin structure disposed on the top surface of the semiconductor substrate, where the fin structure includes a first sidewall and a second sidewall opposite of the first sidewall. The first sidewall is adjacent to a first region of the top surface of the semiconductor substrate and the second sidewall is adjacent to a second region of the top surface of the semiconductor substrate. The fin-shaped field effect transistor device may also include an insulation layer disposed above the fin structure and the first and second regions of the top surface. The fin-shaped field effect transistor device may also include a conductor structure disposed above and adjacent to the insulation layer.
Public/Granted literature
- US20150097220A1 FIN-SHAPED FIELD EFFECT TRANSISTOR AND CAPACITOR STRUCTURES Public/Granted day:2015-04-09
Information query
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