Invention Grant
- Patent Title: Non-evaporable getter and non-evaporable getter pump
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Application No.: US14819093Application Date: 2015-08-05
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Publication No.: US09945368B2Publication Date: 2018-04-17
- Inventor: Fumio Watanabe , Reiki Watanabe
- Applicant: Vaclab Inc.
- Applicant Address: JP Ibaraki
- Assignee: Vaclab Inc.
- Current Assignee: Vaclab Inc.
- Current Assignee Address: JP Ibaraki
- Agency: Muramatsu & Associates
- Priority: JP2014-162078 20140808
- Main IPC: F04B37/02
- IPC: F04B37/02 ; H01J7/18 ; F04B37/08
Abstract:
A non-evaporable getter 1 includes a mesh 3, a frame 2 which is attached to the mesh 3 and suppresses deformation of the mesh 3, and a powder-state getter material 4 which is surrounded by the mesh 3 and the frame 2, and whose particle size is larger than a mesh opening of the mesh 3.
Public/Granted literature
- US20160069338A1 NON-EVAPORABLE GETTER AND NON-EVAPORABLE GETTER PUMP Public/Granted day:2016-03-10
Information query
