发明授权
- 专利标题： Method and technique to control MEMS DVC control waveform for lifetime enhancement
-
申请号： US14889118申请日： 2014-05-16
-
公开(公告)号： US09948212B2公开(公告)日： 2018-04-17
- 发明人: Cong Quoc Khieu , James Douglas Huffman , Richard L. Knipe , Vikram Joshi , Robertus Petrus Van Kampen
- 申请人： CAVENDISH KINETICS, INC.
- 申请人地址： US CA San Jose
- 专利权人： CAVENDISH KINETICS, INC.
- 当前专利权人： CAVENDISH KINETICS, INC.
- 当前专利权人地址： US CA San Jose
- 代理机构： Patterson + Sheridan, LLP
- 代理商 Steven H. VerSteeg
- 国际申请： PCT/US2014/038323 WO 20140516
- 国际公布： WO2014/186656 WO 20141120
- 主分类号： H02N1/00
- IPC分类号： H02N1/00 ; B81B7/00 ; H01G5/18 ; H01H59/00 ; B81B7/02 ; H01G5/011
摘要：
The present invention generally relates to a method of operating a MEMS DVC while minimizing impact of the MEMS device on contact surfaces. By reducing the drive voltage upon the pull-in movement of the MEMS device, the acceleration of the MEMS device towards the contact surface is reduced and thus, the impact velocity is reduced and less damage of the MEMS DVC device occurs.
公开/授权文献
信息查询
