Invention Grant
- Patent Title: Method and technique to control MEMS DVC control waveform for lifetime enhancement
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Application No.: US14889118Application Date: 2014-05-16
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Publication No.: US09948212B2Publication Date: 2018-04-17
- Inventor: Cong Quoc Khieu , James Douglas Huffman , Richard L. Knipe , Vikram Joshi , Robertus Petrus Van Kampen
- Applicant: CAVENDISH KINETICS, INC.
- Applicant Address: US CA San Jose
- Assignee: CAVENDISH KINETICS, INC.
- Current Assignee: CAVENDISH KINETICS, INC.
- Current Assignee Address: US CA San Jose
- Agency: Patterson + Sheridan, LLP
- Agent Steven H. VerSteeg
- International Application: PCT/US2014/038323 WO 20140516
- International Announcement: WO2014/186656 WO 20141120
- Main IPC: H02N1/00
- IPC: H02N1/00 ; B81B7/00 ; H01G5/18 ; H01H59/00 ; B81B7/02 ; H01G5/011
Abstract:
The present invention generally relates to a method of operating a MEMS DVC while minimizing impact of the MEMS device on contact surfaces. By reducing the drive voltage upon the pull-in movement of the MEMS device, the acceleration of the MEMS device towards the contact surface is reduced and thus, the impact velocity is reduced and less damage of the MEMS DVC device occurs.
Public/Granted literature
- US20160072408A1 METHOD AND TECHNIQUE TO CONTROL MEMS DVC CONTROL WAVEFORM FOR LIFETIME ENHANCEMENT Public/Granted day:2016-03-10
Information query
