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公开(公告)号：US10707039B2
公开(公告)日：2020-07-07
申请号：US15771038
申请日：2016-11-14
摘要： The present invention generally relates to a mechanism for making the anchor of the MEMS switch more robust for current handling. The disclosure includes a modified leg and anchor design that allows for larger currents to be handled by the MEMS switch.
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公开(公告)号：US10566140B2
公开(公告)日：2020-02-18
申请号：US14904855
申请日：2014-08-01
摘要： The present invention generally relates to a MEMS DVC utilizing one or more MIM capacitors. The MIM capacitor may be disposed between the MEMS device and the RF pad or the MIM capacitor may be integrated into the MEMS device itself. The MIM capacitor ensures that a low resistance for the MEMS DVC is achieved.
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公开(公告)号：US10403442B2
公开(公告)日：2019-09-03
申请号：US15629161
申请日：2017-06-21
摘要： The present invention generally relates to a MEMS DVC having a shielding electrode structure between the RF electrode and one or more other electrodes that cause a plate to move. The shielding electrode structure may be grounded and, in essence, block or shield the RF electrode from the one or more electrodes that cause the plate to move. By shielding the RF electrode, coupling of the RF electrode to the one or more electrodes that cause the plate to move is reduced and capacitance modulation is reduced or even eliminated.
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公开(公告)号：US10029914B2
公开(公告)日：2018-07-24
申请号：US14916884
申请日：2015-04-23
发明人： James Douglas Huffman , Cong Quoc Khieu , Robertus Petrus Van Kampen , Karl F. Smayling , Vikram Joshi
IPC分类号： H01L29/93 , B81C99/00 , H01G5/16 , H01L23/522 , G01R27/26
摘要： The present invention generally relates to a mechanism for testing a MEMS hysteresis. A power management circuit may be coupled to the electrodes that cause the movable plate that is disposed between the electrodes in a MEMS device to move. The power management circuit may utilize a charge pump, a comparator and a resistor ladder.
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公开(公告)号：US09948212B2
公开(公告)日：2018-04-17
申请号：US14889118
申请日：2014-05-16
发明人： Cong Quoc Khieu , James Douglas Huffman , Richard L. Knipe , Vikram Joshi , Robertus Petrus Van Kampen
CPC分类号： H02N1/006 , B81B7/008 , B81B7/02 , B81B2201/0221 , H01G5/011 , H01G5/18 , H01H59/0009 , H03J2200/39
摘要： The present invention generally relates to a method of operating a MEMS DVC while minimizing impact of the MEMS device on contact surfaces. By reducing the drive voltage upon the pull-in movement of the MEMS device, the acceleration of the MEMS device towards the contact surface is reduced and thus, the impact velocity is reduced and less damage of the MEMS DVC device occurs.
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公开(公告)号：US09711289B2
公开(公告)日：2017-07-18
申请号：US14779564
申请日：2014-04-02
CPC分类号： H01G5/011 , H01G5/013 , H01G5/16 , H01G5/18 , H01H59/0009
摘要： The present invention generally relates to a MEMS DVC having a shielding electrode structure between the RF electrode and one or more other electrodes that cause a plate to move. The shielding electrode structure may be grounded and, in essence, block or shield the RF electrode from the one or more electrodes that cause the plate to move. By shielding the RF electrode, coupling of the RF electrode to the one or more electrodes that cause the plate to move is reduced and capacitance modulation is reduced or even eliminated.
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公开(公告)号：US09385594B2
公开(公告)日：2016-07-05
申请号：US14783281
申请日：2014-04-02
CPC分类号： H02M3/07 , B81B7/00 , B81B7/008 , B81B2201/014 , B81B2203/0109
摘要： The present invention generally relates to a DVC having a charge-pump coupled to a MEMS device. The charge-pump is designed to control the output voltage delivered to the electrodes, such as the pull-in electrode or the pull-off electrode, that move the switching element within the MEMS device between locations spaced far from and disposed closely to the RF electrode.
摘要翻译： 本发明一般涉及具有耦合到MEMS器件的电荷泵的DVC。 电荷泵被设计成控制传递到电极的输出电压，例如拉入电极或拉出电极，其将MEMS器件内的开关元件移动到与RF紧密相邻的位置处 电极。
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公开(公告)号：US11114265B2
公开(公告)日：2021-09-07
申请号：US15770698
申请日：2016-11-14
摘要： The present disclosure generally relates to a mechanism for making a MEMS switch that can switch large electrical powers. Extra landing electrodes are employed that provide added electrical contact along the MEMS device so that when in contact current and heat are removed from the MEMS structure close to the hottest points.
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公开(公告)号：US10896787B2
公开(公告)日：2021-01-19
申请号：US15771026
申请日：2016-11-14
发明人： Robertus Petrus Van Kampen , James Douglas Huffman , Mickael Renault , Shibajyoti Ghosh Dastider , Jacques Marcel Muyango
摘要： The present invention generally relates to a mechanism for making a MEMS switch that has a robust RF-contact by avoiding currents to run through a thin sidewall in a via from the RF-contact to the underlying RF-electrode.
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公开(公告)号：US10163566B2
公开(公告)日：2018-12-25
申请号：US15548992
申请日：2016-01-28
摘要： The present disclosure generally relates to a MEMS DVC utilizing one or more MIM capacitors located in the anchor of the DVC and an Ohmic contact located on the RF-electrode. The MIM capacitor in combination with the ohmic MEMS device ensures that a stable capacitance for the MEMS DVC is achieved with applied RF power.
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