There is provided a method for fabricating a semiconductor device having the following structure, and comprising the steps of growing a nucleation layer on a substrate; depositing a binary layer over the nucleation layer; and annealing the binary layer to form a first contact area and a second contact area on the substrate, wherein the annealed binary layer comprises a group 14 element selected from Si, Ge or their combination thereof, and the annealed binary layer in the first and second contact areas are capable of providing a lower contact resistance for a current to flow in the device. This method serves to provide an intermediate layer which enables the fabrication process to become CMOS compatible.