- 专利标题： Hydrogen-doped germanium nanomembranes
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申请号： US15395905申请日： 2016-12-30
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公开(公告)号： US09955087B1公开(公告)日： 2018-04-24
- 发明人: Zhenqiang Ma , Munho Kim
- 申请人： WISCONSIN ALUMNI RESEARCH FOUNDATION
- 申请人地址： US WI Madison
- 专利权人： Wisconsin Alumni Research Foundation
- 当前专利权人： Wisconsin Alumni Research Foundation
- 当前专利权人地址： US WI Madison
- 代理机构： Bell & Manning, LLC
- 主分类号： H01L21/00
- IPC分类号： H01L21/00 ; H04N5/33 ; H01L31/0288 ; H01L31/18 ; H01L31/0224 ; G02B6/122 ; G02B6/12
摘要：
Photodetectors based on hydrogen-doped, single-crystalline germanium, including waveguide integrated photodetectors for photonic chip applications are provided. Hydrogen doping provides the single-crystalline germanium with increased radiation absorption in the near infrared region of the electromagnetic spectrum, including at wavelengths of 1550 nm and above.