Invention Grant
- Patent Title: Method for manufacturing a device comprising a hermetically sealed vacuum housing and getter
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Application No.: US15320719Application Date: 2015-07-07
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Publication No.: US09957154B2Publication Date: 2018-05-01
- Inventor: Jérôme Favier , David Bunel
- Applicant: ULIS
- Applicant Address: FR Veurey Voroize
- Assignee: ULIS
- Current Assignee: ULIS
- Current Assignee Address: FR Veurey Voroize
- Agency: Marshall, Gerstein & Borun LLP
- Priority: FR1456961 20140718
- International Application: PCT/FR2015/051869 WO 20150707
- International Announcement: WO2016/009126 WO 20160121
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L31/18 ; B81B7/00 ; B81C1/00 ; G01J5/20

Abstract:
A method of manufacturing a device having a microelectronic component housed in a hermetically sealed vacuum housing, including forming a getter in said housing, pumping out and heating the device to degas elements housed in said housing, after said pumping, hermetically sealing the housing in fluxless fashion.Further, each material forming the device likely to degas into the inner space is a mineral material, the getter is capable of substantially trapping hydrogen only and is inert to oxygen and/or to nitrogen and the heating and the sealing are performed at a temperature lower than 300° C.
Public/Granted literature
- US20170137281A1 Method for Manufacturing a Device Comprising a Hermetically Sealed Vacuum Housing and Getter Public/Granted day:2017-05-18
Information query
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