Invention Grant
- Patent Title: Capacitive micromachined ultrasonic transducer and method of fabricating the same
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Application No.: US14286460Application Date: 2014-05-23
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Publication No.: US09957155B2Publication Date: 2018-05-01
- Inventor: Dong-sik Shim , Seog-woo Hong , Seok-whan Chung , Chang-jung Kim
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Sughrue Mion, PLLC
- Priority: KR10-2013-0141587 20131120
- Main IPC: B81B7/00
- IPC: B81B7/00 ; B81C1/00 ; B06B1/02

Abstract:
A capacitive micromachined ultrasonic transducer and a method of fabricating the same are provided. The capacitive micromachined ultrasonic transducer includes a device substrate including a first trench defining a plurality of first portions corresponding to an element and a second trench spaced apart from the first trench; a supporting unit provided on the device substrate, the supporting unit defining a plurality of cavities; a membrane provided on the supporting unit to cover the plurality of cavities; a top electrode electrically connected to a second portion in the second trench through a via hole penetrating through the membrane and the supporting unit; and a through silicon via (TSV) substrate provided on a bottom surface of the device substrate, the TSV substrate including a first via metal connected to the plurality of first portions corresponding to the element and a second via metal connected to the second portion.
Public/Granted literature
- US20150137285A1 CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER AND METHOD OF FABRICATING THE SAME Public/Granted day:2015-05-21
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