- Patent Title: Copolymer and associated layered article, and device-forming method
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Application No.: US14820699Application Date: 2015-08-07
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Publication No.: US09957339B2Publication Date: 2018-05-01
- Inventor: James W. Thackeray , Ke Du , Peter Trefonas, III , Idriss Blakey , Andrew Keith Whittaker
- Applicant: The University of Queensland , Rohm and Haas Electronic Materials LLC
- Applicant Address: US MA Marlborough AU St. Lucia
- Assignee: ROHM AND HAAS ELECTRONIC MATERIALS LLC,THE UNIVERSITY OF QUEENSLAND
- Current Assignee: ROHM AND HAAS ELECTRONIC MATERIALS LLC,THE UNIVERSITY OF QUEENSLAND
- Current Assignee Address: US MA Marlborough AU St. Lucia
- Agency: Cantor Colburn LLP
- Main IPC: C08F220/28
- IPC: C08F220/28 ; B05D1/00 ; G03F7/20 ; G03F7/09
Abstract:
A copolymer is prepared by the polymerization of monomers that include an ultraviolet absorbing monomer, and a base-solubility-enhancing monomer. The copolymer is useful for forming a topcoat layer for electron beam and extreme ultraviolet lithographies. Also described are a layered article including the topcoat layer, and an associated method of forming an electronic device.
Public/Granted literature
- US20170037171A1 COPOLYMER AND ASSOCIATED LAYERED ARTICLE, AND DEVICE-FORMING METHOD Public/Granted day:2017-02-09
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