Invention Grant
- Patent Title: Apparatus for selectively transmitting the spectrum of electromagnetic radiation within a predefined wavelength range
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Application No.: US14399463Application Date: 2012-10-31
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Publication No.: US09958320B2Publication Date: 2018-05-01
- Inventor: Bernd Burchard , Frank Kleinschmidt , Jesco Möller
- Applicant: Elmos Semiconductor AG
- Applicant Address: DE Dortmund
- Assignee: Elmos Semiconductor AG
- Current Assignee: Elmos Semiconductor AG
- Current Assignee Address: DE Dortmund
- Agency: Shumaker & Sieffert, P.A.
- Priority: EP12167001 20120507
- International Application: PCT/EP2012/071595 WO 20121031
- International Announcement: WO2013/167208 WO 20131114
- Main IPC: G01J3/28
- IPC: G01J3/28 ; G01J3/02 ; G02B5/00 ; G02B5/20 ; G01J3/04

Abstract:
The apparatus for selectively transmitting the spectrum of electromagnetic radiation within a predefined wavelength range is provided with a carrier (115), a pinhole diaphragm which is arranged above the carrier (115) and is made of a material that is substantially impermeable to the radiation of interest, wherein the pinhole diaphragm has at least one radiation passage opening with a size for allowing through radiation at a wavelength which is less than or equal to a predefinable upper limit wavelength, and an electrically insulating and optically transparent dielectric layer (103) which is formed on the carrier (115) inside the radiation passage opening and extends, in a manner adjoining the radiation passage opening, between the carrier (115) and at least one section below the pinhole diaphragm. The dielectric layer (103) has a thickness which is less than or equal to half a predefinable lower limit wavelength which is less than the upper limit wavelength.
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