Invention Grant
- Patent Title: Method of manufacturing nano antenna
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Application No.: US15096568Application Date: 2016-04-12
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Publication No.: US09958609B2Publication Date: 2018-05-01
- Inventor: Changbum Lee , Duhyun Lee , Sunil Kim , Jungwoo Kim , Byunggil Jeong
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Sughrue Mion, PLLC
- Priority: KR10-2015-0161056 20151117
- Main IPC: B65B33/00
- IPC: B65B33/00 ; B05D1/32 ; G02B6/13 ; G02B6/122 ; B05D7/00 ; B05D5/06 ; B05D3/00 ; C23C30/00 ; C23C28/00
Abstract:
A method of manufacturing a nano antenna is provided. The method includes forming a material layer on a substrate, defining a portion of the material layer, forming an adhesion layer on the defined portion of the material layer, forming a nano antenna material layer on the adhesion layer, and removing the adhesion layer to thereby manufacture the nano antenna.
Public/Granted literature
- US20170139137A1 METHOD OF MANUFACTURING NANO ANTENNA Public/Granted day:2017-05-18
Information query
