Invention Grant
- Patent Title: Dynamic optical valve for mitigating non-uniform heating in laser processing
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Application No.: US14459016Application Date: 2014-08-13
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Publication No.: US09958709B2Publication Date: 2018-05-01
- Inventor: Bruce E. Adams
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- Main IPC: B23K26/06
- IPC: B23K26/06 ; G02F1/01 ; G02F1/19 ; B23K26/00 ; B23K26/08 ; B23K26/0622 ; B23K101/40 ; B23K103/00

Abstract:
Embodiments of the present invention generally relate to an optical valve that modifies a laser beam to allow more energy to be irradiated onto less absorbing areas on a substrate and less energy to be irradiated onto more absorbing areas on the substrate, thus creating a more uniform heating field. The optical valve is a layered structure comprising a reflective switch layer, an absorbing layer, a thermal resistor and a thermal bath.
Public/Granted literature
- US20150048062A1 DYNAMIC OPTICAL VALVE FOR MITIGATING NON-UNIFORM HEATING IN LASER PROCESSING Public/Granted day:2015-02-19
Information query
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