Invention Grant
- Patent Title: Two-dimensional heterostructure materials
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Application No.: US15215389Application Date: 2016-07-20
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Publication No.: US09964846B2Publication Date: 2018-05-08
- Inventor: David B. Geohegan , Christopher M. Rouleau , Kai Wang , Kai Xiao , Ming-Wei Lin , Alexander A. Puretzky , Masoud Mahjouri-Samani
- Applicant: UT-Battelle, LLC
- Applicant Address: US TN Oak Ridge
- Assignee: UT Battelle, LLC
- Current Assignee: UT Battelle, LLC
- Current Assignee Address: US TN Oak Ridge
- Agency: Brinks Gilson & Lione
- Main IPC: H01L21/337
- IPC: H01L21/337 ; G03F1/20 ; H01L21/033 ; H01L21/02 ; H01L29/06 ; H01L29/24 ; H01L29/735 ; H01L29/778 ; H01L29/16

Abstract:
Methods, articles of manufacture and systems for creating new nanoscale two dimensional materials comprising designed arrays of lateral or vertical heterojunctions may be fabricated by first lithographically masking a 2D material. Exposed, or unmasked, regions of the 2D material may be converted to a different composition of matter to form lateral or vertical heterojunctions according to the patterned mask. PLD and high kinetic energy impingement of atoms may replace or add atoms in the exposed regions, and a plurality of the exposed regions may be converted concurrently. The process may be repeated one or more times on either side of the same 2D material to form any suitable combination of lateral heterojunctions and/or vertical heterojunctions, comprising semiconductors, metals or insulators or any suitable combination thereof. Furthermore, the resulting 2D material may comprise p-n, n-n, p-p, n-p-n and p-n-p junctions, or any suitable combination thereof.
Public/Granted literature
- US20170025505A1 TWO-DIMENSIONAL HETEROSTRUCTURE MATERIALS Public/Granted day:2017-01-26
Information query
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