Invention Grant
- Patent Title: Shape based grouping
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Application No.: US15355606Application Date: 2016-11-18
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Publication No.: US09965848B2Publication Date: 2018-05-08
- Inventor: Saibal Banerjee , Ashok Kulkarni , Jagdish Saraswatula , Santosh Bhattacharyya
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Hodgson Russ LLP
- Priority: IN6863/CHE/2015 20151223
- Main IPC: G06K9/00
- IPC: G06K9/00 ; G06T7/00

Abstract:
Shape primitives are used for inspection of a semiconductor wafer or other workpiece. The shape primitives can define local topological and geometric properties of a design. One or more rules are applied to the shape primitives. The rules can indicate presence of a defect or the likelihood of a defect being present. A rule execution engine can search for an occurrence of the shape primitives covered by the at least one rule.
Public/Granted literature
- US20170186151A1 SHAPE BASED GROUPING Public/Granted day:2017-06-29
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