Invention Grant
- Patent Title: Specimen observation method and device using secondary emission electron and mirror electron detection
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Application No.: US14533974Application Date: 2014-11-05
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Publication No.: US09966227B2Publication Date: 2018-05-08
- Inventor: Masahiro Hatakeyama , Takeshi Murakami , Yoshihiko Naito , Kenji Terao , Norio Kimura , Kenji Watanabe
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2008-103832 20080411; JP2008-173994 20080702; JP2009-031032 20090213; JP2009-044397 20090226; JP2009-059206 20090312
- Main IPC: H01J37/28
- IPC: H01J37/28 ; H01J37/244 ; H01J37/29 ; H01J37/22 ; H01L21/66

Abstract:
A technique capable of improving the ability to observe a specimen using an electron beam in an energy region which has not been conventionally given attention is provided. This specimen observation method comprises: irradiating the specimen with an electron beam; detecting electrons to be observed which have been generated and have obtained information on the specimen by the electron beam irradiation; and generating an image of the specimen from the detected electrons to be observed. The electron beam irradiation comprises irradiating the specimen with the electron beam with a landing energy set in a transition region between a secondary emission electron region in which secondary emission electrons are detected and a mirror electron region in which mirror electrons are detected, thereby causing the secondary emission electrons and the mirror electrons to be mixed as the electrons to be observed. The detection of the electrons to be observed comprises performing the detection in a state where the secondary emission electrons and the mirror electrons are mixed. Observation and inspection can be quickly carried out for a fine foreign material and pattern of 100 nm or less.
Public/Granted literature
- US20150060666A1 SPECIMEN OBSERVATION METHOD AND DEVICE USING SECONDARY EMISSION ELECTRON AND MIRROR ELECTRON DETECTION Public/Granted day:2015-03-05
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