Invention Grant
- Patent Title: Fluid handling structure, a lithographic apparatus and a device manufacturing method
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Application No.: US15451007Application Date: 2017-03-06
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Publication No.: US09971255B2Publication Date: 2018-05-15
- Inventor: Rogier Hendrikus Magdalena Cortie , Nicolaas Ten Kate , Niek Jacobus Johannes Roset , Michel Riepen , Henricus Jozef Castelijns , Cornelius Maria Rops , Jim Vincent Overkamp
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman, LLP
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
A fluid handling structure for a lithographic apparatus, the fluid handling structure having, at a boundary from a space configured to contain immersion fluid to a region external to the fluid handling structure: a meniscus pinning feature to resist passage of immersion fluid in a radially outward direction from the space; and a plurality of gas supply openings in a linear array at least partly surrounding and radially outward of the one or more meniscus pinning features, wherein the plurality of gas supply openings in a linear array are of a similar or the same size.
Public/Granted literature
- US20170176875A1 FLUID HANDLING STRUCTURE, A LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD Public/Granted day:2017-06-22
Information query
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