Invention Grant
- Patent Title: Source/drain epitaxial electrical monitor
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Application No.: US14873677Application Date: 2015-10-02
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Publication No.: US09972550B2Publication Date: 2018-05-15
- Inventor: Edward J. Nowak , Robert R. Robison , Lyndon R. Logan
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY George Town
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY George Town
- Agency: Roberts Mlotkowski Safran Cole & Calderon, P.C.
- Agent Michael LeStrange; Andrew M. Calderon
- Main IPC: H01L31/062
- IPC: H01L31/062 ; H01L29/66 ; G06F17/50 ; H01L21/66 ; H01L27/088 ; G01B7/00

Abstract:
A source/drain epitaxial electrical monitor and methods of characterizing epitaxial growth through capacitance measurements are provided. The structure includes a plurality of fin structures; one or more gate structures, perpendicular to and intersecting the plurality of fin structures. The structure further includes a first connection by a first contact at one fin-end of every other fin structure of the plurality of fin structures, and a second connection by a second contact at one end of an alternate fin structure of the plurality of fin structures.
Public/Granted literature
- US20170098585A1 SOURCE/DRAIN EPITAXIAL ELECTRICAL MONITOR Public/Granted day:2017-04-06
Information query
IPC分类: