Fingerprint sensing device and method for manufacturing a fingerprint sensing device
Abstract:
There is provided a capacitive fingerprint sensing device for sensing a fingerprint pattern of a finger, said capacitive fingerprint sensing device comprising: a protective top layer to be touched by said finger; a first metal layer comprising a two-dimensional array of sensing structures arranged underneath said top layer; a second metal layer, arranged underneath said first metal layer, comprising a plurality of conductive structures a dielectric layer arranged between the first and second metal layers to electrically insulate the first metal layer from the second metal layer, the dielectric layer comprising a low-k material; and readout circuitry arranged underneath said second metal layer and coupled to each of the electrically conductive sensing structures by means of via connections to receive a sensing signal indicative of a distance between said finger and said sensing structure. There is also provided a method for manufacturing such a device.
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