Invention Grant
- Patent Title: Isolated and bulk semiconductor devices formed on a same bulk substrate
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Application No.: US15219138Application Date: 2016-07-25
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Publication No.: US09978636B2Publication Date: 2018-05-22
- Inventor: Annalisa Cappellani , Kelin J. Kuhn , Rafael Rios , Harry Gomez
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H01L21/762
- IPC: H01L21/762 ; H01L29/78 ; H01L29/06 ; H01L27/12 ; H01L27/088

Abstract:
Isolated and bulk semiconductor devices formed on a same bulk substrate and methods to form such devices are described. For example, a semiconductor structure includes a first semiconductor device having a first semiconductor body disposed on a bulk substrate. The first semiconductor body has an uppermost surface with a first horizontal plane. The semiconductor structure also includes a second semiconductor device having a second semiconductor body disposed on an isolation pedestal. The isolation pedestal is disposed on the bulk substrate. The second semiconductor body has an uppermost surface with a second horizontal plane. The first and second horizontal planes are co-planar.
Public/Granted literature
- US20160336219A1 ISOLATED AND BULK SEMICONDUCTOR DEVICES FORMED ON A SAME BULK SUBSTRATE Public/Granted day:2016-11-17
Information query
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