Invention Grant
- Patent Title: Thin film self assembly of topcoat-free silicon-containing diblock copolymers
-
Application No.: US15041095Application Date: 2016-02-11
-
Publication No.: US09982097B2Publication Date: 2018-05-29
- Inventor: Noel Arellano , Teddie P. Magbitang , Daniel P. Sanders , Kristin Schmidt , Ankit Vora
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Michael R. Roberts
- Main IPC: C08G64/18
- IPC: C08G64/18 ; C08G63/08 ; C09D169/00 ; C08G81/02 ; G03F7/00 ; B05D7/00 ; B05D3/02 ; H01J37/32 ; C09D125/08 ; C09D167/04 ; C09D187/00 ; C09D125/18 ; C08G65/08 ; C08G64/02

Abstract:
A high-chi diblock copolymer (BCP) for self-assembly comprises a first block comprising repeat units of trimethylsilyl styrene (TMSS) and styrene, and a second block comprising an aliphatic carbonate repeat unit. The blocks are linked together by a fluorinated junction group L′ in which none of the fluorines of L′ are covalently bound to an atomic center of the polymer backbone. A top-coat free film layer comprising the BCP, which is disposed on an underlayer and in contact with an atmosphere, is capable of forming a perpendicularly oriented lamellar domain pattern on an underlayer that is preferential or non-preferential to the domains of the block copolymer. The domain pattern can be selectively etched to provide a relief pattern comprising a remaining domain. The relief pattern having good critical dimensional uniformity compared to an otherwise identical polymer lacking the silicon.
Public/Granted literature
- US20170233532A1 THIN FILM SELF ASSEMBLY OF TOPCOAT-FREE SILICON-CONTAINING DIBLOCK COPOLYMERS Public/Granted day:2017-08-17
Information query