- 专利标题: Method of fabricating a probe
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申请号: US14287760申请日: 2014-05-27
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公开(公告)号: US09986914B2公开(公告)日: 2018-06-05
- 发明人: John C. Wolfe , Mufaddal Gheewala , Wei-Chuan Shih , Gopathy Purushothaman
- 申请人: John C. Wolfe , Mufaddal Gheewala , Wei-Chuan Shih , Gopathy Purushothaman
- 申请人地址: US TX Houston US TN Nashville
- 专利权人: UNIVERSITY OF HOUSTON SYSTEM,VANDERBILT UNIVERSITY
- 当前专利权人: UNIVERSITY OF HOUSTON SYSTEM,VANDERBILT UNIVERSITY
- 当前专利权人地址: US TX Houston US TN Nashville
- 代理机构: Winstead PC
- 主分类号: H01L31/0224
- IPC分类号: H01L31/0224 ; A61B5/00 ; A61B5/04 ; H01L33/38
摘要:
An optrode may provide a cylindrical substrate two or more electrodes deposited said cylindrical substrate. The cylindrical substrate and electrodes may be coated by an insulating layer with openings or vias over certain portions of the electrodes that may provide a contact for the neural probe or may be utilized to connect lead lines. Manufacturing of an optrode may utilize a jig that secures a cylindrical substrate coated by a conductive material and a resist. A first mask may be positioned in an opening provided by the jig, and the cylindrical substrate may be exposed ions or neutral particles to define one or more electrode patterns. After regions of the resist and conductive material are removed to form the electrodes, a second mask may be utilized to define vias regions in which portions of the electrodes are exposed and uncoated by an insulating layer.
公开/授权文献
- US20140350375A1 INTEGRATED THIN-FILM OPTRODE 公开/授权日:2014-11-27
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