公开(公告)号：US09986914B2

公开(公告)日：2018-06-05

申请号：US14287760

申请日：2014-05-27

申请人： John C. Wolfe ,  Mufaddal Gheewala ,  Wei-Chuan Shih ,  Gopathy Purushothaman

发明人： John C. Wolfe ,  Mufaddal Gheewala ,  Wei-Chuan Shih ,  Gopathy Purushothaman

IPC分类号： H01L31/0224 ,  A61B5/00 ,  A61B5/04 ,  H01L33/38

CPC分类号： A61B5/0084 ,  A61B5/04001 ,  A61B5/4064 ,  A61B2562/12 ,  H01L31/022408 ,  H01L33/382

摘要： An optrode may provide a cylindrical substrate two or more electrodes deposited said cylindrical substrate. The cylindrical substrate and electrodes may be coated by an insulating layer with openings or vias over certain portions of the electrodes that may provide a contact for the neural probe or may be utilized to connect lead lines. Manufacturing of an optrode may utilize a jig that secures a cylindrical substrate coated by a conductive material and a resist. A first mask may be positioned in an opening provided by the jig, and the cylindrical substrate may be exposed ions or neutral particles to define one or more electrode patterns. After regions of the resist and conductive material are removed to form the electrodes, a second mask may be utilized to define vias regions in which portions of the electrodes are exposed and uncoated by an insulating layer.

公开(公告)号：US20140350375A1

公开(公告)日：2014-11-27

申请号：US14287760

申请日：2014-05-27

申请人： John C. Wolfe ,  Mufaddal Gheewala ,  Wei-Chuan Shih ,  Gopathy Purushothaman

发明人： John C. Wolfe ,  Mufaddal Gheewala ,  Wei-Chuan Shih ,  Gopathy Purushothaman

IPC分类号： A61B5/00 ,  A61B19/00 ,  A61B5/04 ,  H01L33/38 ,  H01L31/0224

CPC分类号： A61B5/0084 ,  A61B5/04001 ,  A61B5/4064 ,  A61B2562/12 ,  H01L31/022408 ,  H01L33/382

摘要： An optrode may provide a cylindrical substrate two or more electrodes deposited said cylindrical substrate. The cylindrical substrate and electrodes may be coated by an insulating layer with openings or vias over certain portions of the electrodes that may provide a contact for the neural probe or may be utilized to connect lead lines. Manufacturing of an optrode may utilize a jig that secures a cylindrical substrate coated by a conductive material and a resist. A first mask may be positioned in an opening provided by the jig, and the cylindrical substrate may be exposed ions or neutral particles to define one or more electrode patterns. After regions of the resist and conductive material are removed to form the electrodes, a second mask may be utilized to define vias regions in which portions of the electrodes are exposed and uncoated by an insulating layer.

摘要翻译： 光电可以提供圆柱形衬底，两个或多个电极沉积所述圆柱形衬底。 圆柱形基底和电极可以通过绝缘层涂覆，该绝缘层具有在电极的某些部分上的开口或通孔，其可以为神经探针提供接触，或者可以用于连接导线。 光栅的制造可以利用固定由导电材料和抗蚀剂涂覆的圆柱形基底的夹具。 可以将第一掩模定位在由夹具提供的开口中，并且圆柱形基底可以是暴露的离子或中性粒子以限定一个或多个电极图案。 在去除抗蚀剂和导电材料的区域以形成电极之后，可以使用第二掩模来限定通孔区域，其中电极的部分被绝缘层暴露和未涂覆。