- 专利标题: Superheated steam treatment apparatus
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申请号: US15031940申请日: 2014-10-10
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公开(公告)号: US09989245B2公开(公告)日: 2018-06-05
- 发明人: Naoto Fujimura
- 申请人: Shin-Etsu Chemical Co., Ltd.
- 申请人地址: JP Tokyo
- 专利权人: SHIN-ETSU CHEMICAL CO., LTD.
- 当前专利权人: SHIN-ETSU CHEMICAL CO., LTD.
- 当前专利权人地址: JP Tokyo
- 代理机构: Brinks Gilson & Lione
- 优先权: JP2013-221181 20131024
- 国际申请: PCT/JP2014/077166 WO 20141010
- 国际公布: WO2015/060140 WO 20150430
- 主分类号: F22G1/16
- IPC分类号: F22G1/16 ; H05B6/10 ; F22B1/28
摘要:
To provide a superheated steam treatment apparatus capable of efficiently treating an object by superheated steam containing a high concentration of hydroxyl radicals. The superheated steam treatment apparatus includes an induction heating unit 4 configured to generate superheated steam by induction heating saturated stream, a treatment chamber 5 configured to allow the superheated steam generated by the induction heating unit 4 to be introduced thereinto, and a discharge treatment unit 6 located in the treatment chamber 5 and configured to treat the introduced superheated steam by discharge. The discharge treatment unit 6 has a frame serving as a support for the discharge treatment unit, a discharge electrode located at an upper part of the frame, a mesh-like opposite electrode located below the discharge electrode, and a high-frequency power source configured to supply high-frequency, high-voltage power between the discharge electrode and the opposite electrode to cause the discharge, whereby an object immediately below the opposite electrode is allowed to be treated by the superheated steam having an increased hydroxyl radical concentration due to the discharge.
公开/授权文献
- US20160273758A1 SUPERHEATED STEAM TREATMENT APPARATUS 公开/授权日:2016-09-22
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