Invention Grant
- Patent Title: Simultaneous multi-spot inspection and imaging
-
Application No.: US15393658Application Date: 2016-12-29
-
Publication No.: US09989477B2Publication Date: 2018-06-05
- Inventor: Mehdi Vaez-Iravani , Lawrence Robert Miller
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Kwan & Olynick LLP
- Main IPC: G01N21/00
- IPC: G01N21/00 ; G01N21/88 ; G01N21/95

Abstract:
A compact and versatile multi-spot inspection imaging system employs an objective for focusing an array of radiation beams to a surface and a second reflective or refractive objective having a large numerical aperture for collecting scattered radiation from the array of illuminated spots. The scattered radiation from each illuminated spot is focused to a corresponding optical fiber channel so that information about a scattering may be conveyed to a corresponding detector in a remote detector array for processing. In one embodiment, a one-dimensional array of illumination beams is directed at an oblique angle to the surface to illuminate a line of illuminated spots at an angle to the plane of incidence. Radiation scattered from the spots are collected along directions perpendicular to the line of spots or in a double dark field configuration.
Public/Granted literature
- US20170205358A1 SIMULTANEOUS MULTI-SPOT INSPECTION AND IMAGING Public/Granted day:2017-07-20
Information query