- 专利标题: Interconnect structure having power rail structure and related method
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申请号: US15220764申请日: 2016-07-27
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公开(公告)号: US09997456B2公开(公告)日: 2018-06-12
- 发明人: Erdem Kaltalioglu , Atsushi Ogino
- 申请人: GLOBALFOUNDRIES INC.
- 申请人地址: KY Grand Cayman
- 专利权人: GLOBALFOUNDRIES INC.
- 当前专利权人: GLOBALFOUNDRIES INC.
- 当前专利权人地址: KY Grand Cayman
- 代理机构: Hoffman Warnick LLC
- 代理商 Yuanmin Cai
- 主分类号: H01L23/528
- IPC分类号: H01L23/528 ; H01L23/498 ; H01L21/48 ; H01L23/48 ; H01L23/52 ; H01L23/522
摘要:
Disclosed herein is an integrated circuit (IC) including a first metal layer running in a first direction, a second metal layer running in a second direction perpendicular to the first direction, the second metal layer above the first metal layer and a third metal layer running in the first direction above the second metal layer. A viabar electrically connects the first metal layer to the third metal layer, the viabar running in the first direction wherein the viabar vertically extends from the first metal layer to the third metal layer. A method of manufacturing the IC is provided.
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