Invention Grant
- Patent Title: Interconnect structure having power rail structure and related method
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Application No.: US15220764Application Date: 2016-07-27
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Publication No.: US09997456B2Publication Date: 2018-06-12
- Inventor: Erdem Kaltalioglu , Atsushi Ogino
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Hoffman Warnick LLC
- Agent Yuanmin Cai
- Main IPC: H01L23/528
- IPC: H01L23/528 ; H01L23/498 ; H01L21/48 ; H01L23/48 ; H01L23/52 ; H01L23/522

Abstract:
Disclosed herein is an integrated circuit (IC) including a first metal layer running in a first direction, a second metal layer running in a second direction perpendicular to the first direction, the second metal layer above the first metal layer and a third metal layer running in the first direction above the second metal layer. A viabar electrically connects the first metal layer to the third metal layer, the viabar running in the first direction wherein the viabar vertically extends from the first metal layer to the third metal layer. A method of manufacturing the IC is provided.
Public/Granted literature
- US20180033718A1 INTERCONNECT STRUCTURE HAVING POWER RAIL STRUCTURE AND RELATED METHOD Public/Granted day:2018-02-01
Information query
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