- 专利标题: Wafer carrier with a 14-pocket configuration
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申请号: US29522212申请日: 2015-03-27
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公开(公告)号: USD793971S1公开(公告)日: 2017-08-08
- 设计人: Sandeep Krishnan , Raghu Moorkannaiah
- 申请人: Veeco Instruments Inc.
- 申请人地址: US NY Plainview
- 专利权人: Veeco Instruments Inc.
- 当前专利权人: Veeco Instruments Inc.
- 当前专利权人地址: US NY Plainview
- 代理机构: Patterson Thuente Pedersen, P.A.
- LOC分类号: 13-03
摘要:
A wafer carrier including fourteen pockets arranged on a top surface.
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