- 专利标题: Wafer carrier with a multi-pocket configuration
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申请号: US29587929申请日: 2016-12-16
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公开(公告)号: USD806046S1公开(公告)日: 2017-12-26
- 设计人: Alexander Gurary , Mandar Deshpande , Aniruddh Parekh , Yuliy Rashkovsky
- 申请人: Veeco Instruments Inc.
- 申请人地址: US NY Plainview
- 专利权人: Veeco Instruments Inc.
- 当前专利权人: Veeco Instruments Inc.
- 当前专利权人地址: US NY Plainview
- 代理机构: Patterson Thuente Pedersen, P.A.
- LOC分类号: 13-03
摘要:
A wafer carrier including thirty-five pockets arranged on a top surface, configured to be used with a chemical vapor deposition device, is provided. The wafer carrier comprises: a body having a top surface and a bottom surface arranged opposite one another, and a plurality of pockets defined in the top surface of the wafer carrier, wherein the plurality of pockets consist of a total of thirty-five pockets, each of the pockets is arranged along one of three circles, and the three circles are concentric with one another and with a circular outline formed by a perimeter of the top surface.
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